| — | 13,195.1 | 15,984.7 | | | | | | | | | | | |
| — | 8,573.6 | 5,953.9 | | | | | | | | | | | |
| — | 21,139.7 | 21,622.4 | | | | | | | | | | | |
Used System Sales Revenue | — | 629 | 316.2 | | | | | | | | | | | |
EXE Net System Sales (Units) | — | 2 | — | | | | | | | | | | | |
NXE Net System Sales (Units) | — | 42 | 53 | | | | | | | | | | | |
Total EUV Net System Sales (Units) | 48 | 44 | 53 | | | | | | | | | | | |
ArFI Net System Sales (Units) | 133 | 129 | 125 | | | | | | | | | | | |
ArF Dry Net System Sales (Units) | 17 | 28 | 32 | | | | | | | | | | | |
KrF Net System Sales (Units) | 101 | 152 | 184 | | | | | | | | | | | |
I-Line Net System Sales (Units) | 58 | 65 | 55 | | | | | | | | | | | |
Total DUV Net System Sales (Units) | 334 | 374 | 396 | | | | | | | | | | | |
Metrology & Inspection Net System Sales (Units) | — | 165 | 151 | | | | | | | | | | | |
Total Net System Sales (Units) | — | 583 | 600 | | | | | | | | | | | |
Logic Net System Sales (Units) | — | 399 | 439 | | | | | | | | | | | |
Memory Net System Sales (Units) | — | 184 | 161 | | | | | | | | | | | |
New Lithography System Sales (Units) | 325 | 380 | 421 | | | | | | | | | | | |
Used Lithography System Sales (Units) | 32 | 38 | 28 | | | | | | | | | | | |
| 21,964 | 18,899 | 20,040 | | | | | | | | | | | |