EXE Net System Sales (Units) | — | — | | | | | | | | | | | | | | | |
NXE Net System Sales (Units) | — | — | | | | | | | | | | | | | | | |
Total EUV Net System Sales (Units) | 9 | 11 | | | | | | | | | | | | | | | |
ArFI Net System Sales (Units) | 38 | 31 | | | | | | | | | | | | | | | |
ArF Dry Net System Sales (Units) | 4 | 4 | | | | | | | | | | | | | | | |
KrF Net System Sales (Units) | 11 | 16 | | | | | | | | | | | | | | | |
I-Line Net System Sales (Units) | 10 | 14 | | | | | | | | | | | | | | | |
Total DUV Net System Sales (Units) | 63 | 76 | | | | | | | | | | | | | | | |
New Lithography System Sales (Units) | 66 | 67 | | | | | | | | | | | | | | | |
Used Lithography System Sales (Units) | 6 | 9 | | | | | | | | | | | | | | | |
| 5,399 | 5,541 | | | | | | | | | | | | | | | |